摘要:This paper is to review our space optical remote sensor(SORS) technologies including optical materials, optics fabrication and coating, optical testing, system assembly and final testing, and space environment simulation experiment conducted in our institute. The primary parts of the fabrication and testing facilities and results are described in detail.
关键词:space optics;optical remote sensing;optical material;optical fabrication and inspection;optical system assembly and testing
摘要:The authors have been working on a newsurface encoder for detecting multi-degree-of-freedom(MDOF) translational and tilt motionsof precision stages[1]. The surface encoder con-sists of two fundamental elements: a sinusoidalmicrostructured metrology surface, which is re-ferred to as the angle grid, and a two-dimension-al (2D) slope sensor[2-3].