Chinese Version Light学术出版中心
Latest Issue
Issue 2 ， 2003
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Fabrication process analysis for electrostatically actuated microgripper based on silicon bulk micromachining
Abstract：The fabrication process of a comb-drive electrostatically actuated microgripper based on silicon bulk micromachining is described in detail, with the effect of ICP etch time on structure analysed. Some factors causing microgripper failure identified, and advices provided for avoidance of failure. With a fractional ICP etch method used to control the etch time a gripper finger of 6 μm wide and 5 470 μm high was successfully released. A high aspect ratio microgripper with S-shaped flexible fingers has been developed.- 71
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Published：2020-08-12 -
Prediction of electromigration failure in passivated polycrystalline line
Abstract：Recently, a governing parameter for electromigration damage in passivated polycrystalline lines, AFDgen*, was formulated considering the effect of the atomic density gradient. In this study, a prediction method for electromigration failure in a passivated polycrystalline line was proposed using AFDgen*. The characteristics of film used for prediction is established in advance using a method based on AFDgen*. The film characteristics of metal lines with different lengths were determined experimentally by AFDgen*-based method. From the film characteristics obtained, both lifetime and location of failure in the passivated polycrystalline lines were predicted through numerical simulation of failure process. Good agreement has been shown between the predicted and the experimental results concerning both lifetime and location of failure.Keywords：electromigration;passivated polycrystalline- 36
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Published：2020-08-12 -
Electro-magnetic planar micromotor and its fabrication
Abstract：A kind of MEMS technology has been proposed for fabrication of micromotors, which are small in size, high in output torque and rotational speed, and speed controllable. The rotors and stators of the micromotor are all planar, the windings are made planar, grooveless and concentric using the LIGA technology and silicon micromachine technology. They are connected with three-phase stellated NdFeB permanent-magnet material and the rotor is magnetized axially.Two rotors are distributed at both sides of the stator, symmetrically. This kind of structure can not only reduce the axial dimension of the micromotor, but also reduce the convection of rotors and stators to the air. Finally, the assembled micromotor is run by three-phase square wave current. The results show that the micromotor has many advantages, such as stable speed and less ripple in the output torque.Keywords：planar micromotor;LIGA technology- 49
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Published：2020-08-12 -
Micro-machining system based on AFM
Abstract：It is proposed to establish a micro-machining system with a three-dimension micro-displacement stage, an AFM system working in Contact and Height mode and a sharp diamond tip. A closed loop system is composed of the tip, the PSD, the feedback circuit, the scanning PZT, and the controller computer to keep the load force at the tip constant. A RS-232 serial port is used to perform the communication between a computer and the stage with programs provided to get the geometric locus of the microstructure, and then control the movement of the stage. Experimental results indicate that this system proposed is able to fabricate microstructures and parts, for example, micro sensors. The precision of their shape and dimension is mainly determined by the high precision stage. The depth can be changed by the load force of the tip or the feed of the stage. The working range of the AFM is therefore extended and almost any of the materials can be machined with this system. High precision and complex microstructures can be fabricated by optimizing the parameters.Keywords：AFM;micro machining;serial communication- 42
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Published：2020-08-12 -
Development of low voltage integrated electrophoresis chip
Abstract：A model has been established for low voltage separation of electrophoresis chips by alternative and cyclical fragmental application of voltage at both sides of the separation channel. The fabrication and control of low voltage integrated electrophoresis chips have been studied using this model, with samples produced. Initial experiments show the new idea of low voltage separation is one of the ways and means for integration and portable design of electrophoresis chips.Keywords：low voltage;integrated electrophoresis chip;fabrication process;control system- 63
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Published：2020-08-12 -
Effect of film thickness errors on performance of soft X-ray multilayer
Abstract：The effect of film thickness control errors on the performance of soft X-ray multilayer is discussed in detail. The results show that the primary error is a systemic error of the instrument itself which causes the peak of reflectivity change and the secondary error is a stochastic error which control decreases the magnitude of reflectivity.Keywords：Soft X-ray;Multilayer;film thickness errors;reflectivity- 72
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Published：2020-08-12 -
Diamond cutting of optical brittle materials
Abstract：Modern ultraprecision machining technologies essential for formation of ultraprecision optical surfaces on optical crystal,optical glass and other brittle materials, such as ultraprecision lapping, ultraprecision lapping,ultraprecision polishing,ultraprecision grinding, ultraprecision cutting,and ultraprecision diamond cutting of brittle materials in particular, are discussed in detail.Keywords：brittle material;soft-brittle material;diamond cutting;test design- 63
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Published：2020-08-12 -
Computer-aided alignment of Schwarzschildobjective with off-axis illumination
Abstract：The application of computer-aided alignment in Schwarzschild objective system with off-axis illumination is described and a Newton's method based on the singular value decomposition (SVD) was used to calculate the value of misalignment. With the use of SVD to decompose the sensitivity matrix, the sensitivity of the configuration was obtained for the aberration and the compensators were sekected from the configuration. The simulation alignments were carried out in this way on a large number of random misalignments and all of them were converged.Keywords：EUVL;optical system alignment;singular value decomposition- 71
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Published：2020-08-12 -
Optimization of tube truss for space solar telescope
Abstract：In order to make the first order natural frequency of a Space Solar Telescope the highest under the restriction of a constant total mass, the optimization of the tube truss is accomplished in two steps: 1) the tier number of the truss and the web-member number in each tier are established using a series of simplified structural models; 2)the cross sections of all the members of the truss are optimized using ANSYS software.Keywords：space telescope;tube truss;structural optimization- 60
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Published：2020-08-12 -
Application of binary optical lens in hyperspectral imager
Abstract：The abundant chromatic aberration of a binary optical lens is used in a novel configuration to create a hyperspectral imager. A diffractive-refractive hybrid singlet is used to replace a binary optical phase lens for an imaging spectrometer.The system is analysed and evaluated with optical software ZEMAX, theoretical formulas are then established, and a binary optical lens is manufactured by ion etching.Keywords：hyperspectral imagers;binary optical lenses;imaging spectrometers;diffractive-refractive hybrid singlet;ion etching- 68
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Published：2020-08-12 -
Compensation for long focus oblique real-time aerial camera being out of focus
Abstract：Based on the experience gained from the development of a long focus, oblique, real-time, aerial camera, it is pointed out that the camera maybe out of focus is due to changes in temperature, atmospheric pressure and oblique photographic distance. The effect of these three factors on a camera is discussed and a simple mathematical equation is proposed for calculation of how much a camera is out of focus. A new simple method is to compensate out of focus of oblique photographic distance. The principle is very easy to implement. Finally, the paper introduces a auto-focusing system with double-deck guideway and double-deck cam, and its focusing of oblique photography is tested.Keywords：Out of focus;atmospheric temperature;atmospheric pressure;oblique photographic distance- 52
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Published：2020-08-12 -
Calibration error analysis and way of calibration forspatial curvature measurement
Abstract：The causes for spatial curvature measurement errors are analysed, and the relationship between the curvature in the direction of calibration and the signal in the direction of measurement is discussed. With a relevant formula established, a new method is proposed for the correction of the calibration error. The geometric meaning of this method is then defined not only for measurement of spatial curvature, but also for inspection for some other spatial vectors.Keywords：curvature measuring;3D curve fitting;calibration error;calibration method- 55
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Published：2020-08-12 -
Measurement of wire diameter by two point sources projection
Abstract：In the new wire diameter online measurement system proposed, laser diode was used as the point light source to emit spheric waves passing through a wire. The diameter of a thin wire was obtained by measuring the shadow in the Fresnel diffraction zone. Two point sources at some distance were used to generate two shadows of the same wire at the same time and the deviation of the wire can be determined by the distance between the two shadows so that the wire diameter can be calibrated.Keywords：online measurement;projection;laser diode;point light source- 49
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Published：2020-08-12 -
Calibration of programmable dynamic target
Abstract：Some methods based on statistics for dimensional position and data processing by such software as Excel are suggested for the calibration of the dimensional angle shown by a dynamic target using linear matrix CCD and video interpretation. Experimental results show that these methods can be effectively used to reduce the TV undershoot errors resulting from asynchronous exposal, scan and transfer, and consequently achieve the calibration of dynamic target.Keywords：dynamic target;dynamic calibration;linear matrix CCD;Video interpretation- 58
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Published：2020-08-12 -
Novel method for solving maximum inscribed circle
Abstract：A novel method has been proposed according to the minimum criterion for solving maximum inscribed circle. Two mathematical formulae have been developed for the establishment of the center of the maximum inscribed circle for the profile measured in such a way that a circle is decided by putting the coordinate values of the three points selected from the profile measured into the formulae developed. These three points form an acute triangle. The formulae can be used two or three times. Another point selected from the profile replaces one of the former three points each time. According with the minimum criterion, the final circle is just the maximum inscribed circle, of the profile measured when the whole profile measured is outside the circle. A flow chart of program and two examples are given in the paper. There is no principle error or method error in the results calculated by the formulae.Keywords：roundness error;maximum inscribed circle (MIC);roundness measurement- 54
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Published：2020-08-12 -
Adaptive unsharp masking method based on region segmentation
Abstract：A adaptive unsharp masking method based on region segmentation is presented aiming at the defects of linear unsharp masking. The input image is divided into homogeneous areas, medium contrast areas and large contrast areas by the local variance of image pixels. Base on the area type to which image pixel (x,y) belongs, the local activity gain factor α(x,y) and the desired output local activity Hd(x,y) are determined adaptively, and the enhancement factor K(x,y) is derived. A X-ray chest image is processed with the proposed method and other unsharp masking methods. The results show that good capabilities of edge enhancing and noise suppressing are achieved by the proposed method.Keywords：adaptive unsharp masking;local activity;edge enhancement;Noise- 37
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Published：2020-08-12 -
Safety and reliability during application of RS-485 bus network
Abstract：At present, the physical layers of commonly used field buses, such as ARCNET, CAN, INTERBUS-S are based on RS-485 bus standard. The automatic control network adopting RS-485 bus features simple structure and low cost. However, any misconfiguration of RS-485 bus network may reduce the reliability of communication over the whole network, and even damage the receiver and transmitter and disable the whole network. Some proposals have been made for the application of the RS-485 bus in the radar distributed supervisory control system to ensure the safety and reliability of communication.These methods proposed have been proved effective, as expected in practice.Keywords：RS-485;safety;Reliability;distributed supervisory control;common mode interference- 53
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Published：2020-08-12 -
Development of UV fingerprint identification device
Abstract：The basic structure, operating principle, performance of a new fingerprint identification system are described in detail together with some test results. It is suggested at the same time that appropriate UV lens, UV image intensifier, correlative UV homochromy filter and special image disposal software must be developed.Keywords：distinguish fingerprint;image intensified device;Filter- 43
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Published：2020-08-12 -
New way of communication between PC and several SCMS based on Windows
Abstract：A new way of serial communication between a PC and a middle controller in Windows is proposed for measurement and control of a distributed ISA-bus system. A position measuring and motor control system is designed in this way to realize the real time communication between a PC and several SCMs. The reliability and efficiency of commuication achieved in this way has been proved through experiments.Keywords：serial communication;middle controller;SCM;measurement and control system of distribution- 64
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Published：2020-08-12 -
Assessment of sampled imaging system based on information-theory
Abstract：The theoretical basis for assessment of a sampled imaging system based on information theory is discussed, and the optical and image information processing methods are examined. The integrated optical and electronic designs of the sampled imaging system are proposed. The confusion in images is reduced and the quality of image is improved by matching an optical imagery system with a CCD detection system.Keywords：information rate;fidelity;end-to-end assessment;CCD;aliasing noise- 45
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Published：2020-08-12
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