Chinese Version Light学术出版中心
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Issue 1 ， 2003
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Electrostatically actuated microgripper based on silicon bulk microma chining
Abstract：The characteristics of an electrostatically actuated comb-drive microgripp er were tested with its information and status acquired using the t est platfor m of Microscope-CCD-micro-computer. The voltage-d isplacement characteristic was obtained through image processing and analysis. The analysis of the characteristic equation deduced from miscellaneous factors indicates that the theoretical design is rational and consistent with the experimental results. The differenc e between theoretical design and practical device is discussed with the desig n rule, fabrication and experiment process taken into consideration. The causati on demonstrates that present theoretical design and fabrication technology need further improvement to meet the design requirements for micro-electromechanical devices.Keywords：microgripper;image processing;experimental analysis- 48
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Published：2020-08-12 -
Using metastable argon atomic beam to fabricate nanostructures
Abstract：Fabrication of nanostructures is an important part of nanotechnology,and atom li thography technology is a new nanostructure fabrication method. A me tastable a rgon atomic beam generated by high-voltage discharge is collimated to minimize t he divergence angle of atomic beam.Metastable atoms are quenched when well-c ollimated beam travels through the light standing wave perpendicular to the prop agation direction of the atomic beam,and then deposited onto the substrate. SAM abso rbed on substrate surface is damaged by metastable atoms,and the nanometer-scale structure can be fabricated with etching technologies. The basic principle,expe rimental schemes,correlative theory of this technique and simulation results are given.Keywords：metastable argon atom;fabrication of nanostructures;light standing wave quenching- 49
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Published：2020-08-12 -
Micro in-pipe robot for detection of cracks in pip e wall
Abstract：Small pipes of φ10～20 mm in diameter are widely used in different industries, and it is therefore necessary to develop robots which can climb inside pipes to detect cracks in walls . Several micro robots, such as of screw f riction drive type, electro-magnetic force type, SMA type and PZT impact type have been developed for this purpose in recent years, and adv anced achievements have been made. An experimental micro in- pipe robot with PZT type actuat or, which can carry a small CCD camera and climb into a φ20 mm vertical, hori zontal or curved pipe to detect fine holes or cracks in inner walls. The moving principle of the micro robot, structural design and performance test w ere described in detail.Keywords：robot;detecting;crack;Pipe- 57
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Published：2020-08-12 -
Doppler analysis for double-grating displacement measurement s ystem with nanometer resolution
Abstract：Unlike other papers which listed the measuring equation only, and didn't touch t he operation principle, a double-grating displacement measurment system with a resolution of one nanometer is analyzed using Doppler theory in this paper. The optical structure of the gr a ting system is first shown in detail, the diffraction sequences are described in turn, a mathematic model of incident and emission light beam is then establishe d for Doppler effect, and finally the relationship between the displacement valu e and the corresponding Moir? signals is established with this model. The function of refere nce grating is ex plained, and the characteristics of this grating system are listed.Keywords：Doppler analysis;diffraction grating;displacement measurment;Moir? fringes- 110
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Published：2020-08-12 -
Measurement and machining in microfabrication based on radiation pressure control
Abstract：We have been developing new fabrication tools based on optical radiation pressur e and related phenomena to develop aflexible and accurate microfabrication tec hnology. In this paper, the laser trapping probe for the nano-CMM for assessment , in addition to micromachining technique using a small particle controlled by optical radiation pressure and laser aggregation technique are discussed. As the positional detection probe for the nano-CMM, an optically trapped silica particle with 8 mm diameter in forced oscillation state is used. A probe sphere retains a stable position when applied with trapping force by Nd:YAG laser light formed an nu lar and is forced to oscillate by the driving force changed by modulating the in tensity of LD emission. Experintal results show that this vibrational microprobe h as the possibility to achieve positional sensing accuracy of less than 25 nm. As a new micromachining technique, nano-removal process using an optically trapped micro-grain is proposed. The laser trapping force enables not only to stably trap the diamond grain with asymmetrical shape but also to freely control the positi on with spinning. Using this micro machining tool, the machining experiments of h ydrocarbon film are performed. AFM observation confirmed that the fine groove wi th depths of about 3～4 nm can be fabricated. As an additive process based on ra diation pressure, a laser microstructure fabrication using laser agglomeration p h enomena of colloidal particles aided by radiation pressure is investigated. By c ontrolling laser beam scanning in slurry containing KOH solution and SiO2 par ticles with a diameter of 140 nm, colloidal particles are aggregated and adhered firmly to a silicon wafer substrate. Using this laser agglomerating process, two-dimensional grid microstructures at the pitch of 5 mm can be fabricated.Keywords：radiation pressure;nano-CMM;probe;micromachining tool;micropart- 51
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Published：2020-08-12 -
Simulation and model analysis of MEMS
Abstract：The modelling method, computer-aided modellin g tools, multi-domain model libraries, and coupling different simulators are dis cussed from methodologic point of view. The electrical network concept is introd uced in t he simulation of different domain systems, in which equivalent circuits are appl ie d to physical quantities between different domain systems. The building of compo nent model libraries is considered because it is very important for the system m odelling and simulation. The multi-terminal port elements can be introduced and described by linear and nonlinear differential equations. In addition, the o rder reduction problem, model optimization methods, related simulation tools and the coupling between simulators are analyzed.Keywords：multi-domain system simulation;generalized net works;optimization;model library- 46
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Published：2020-08-12 -
MEMS measurement technologies and methods
Abstract：The rapid development of microelectromechanical systems (MEMS) makes i t necessary to have precise measurement during the design , simulation, fabrication, and evaluation of MEMS. The MEMS measu r ement technologies and methods are reviewed from the viewpoints of mechanical pa ramet ers,geometric dimensions and material properties on a micro-scale. The micro-vi si on metrology technology, the interferometer and some optoelectronic detection me thods used for measurement are discussed in detail.- 58
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Published：2020-08-12 -
Calculation and simulation of spring-mass system for micro vibration power generator
Abstract：A structural model has been established for the spring-mass system and the key c omp onents of a micro vibration power generator. In order to calculate t he d eflection of the spring-mass system, dynamics finite element analysis (FEA) with the ANSYS Finite-Element program was performed, and the results der ived from FEA are analyzed for the structure and its displacement, resonant frequency and mode, and consequently, the whole st ructural design of the micro vibration power generator was optimized.Keywords：micro power generator;Computer simulation;inherence frequency;mode- 49
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Published：2020-08-12 -
Design of X-ray supermirrors
Abstract：A new method of designing X-ray supermirrors based semi-empirical formulas and optimization by computer has been proposed to produced an optimized be tter initial multilayer in dramatically reduced computational time. The saturation effect of interfacial roughness of mu ltilayers actually produced in X-ray supermirrors on per formance of multilayers is further discussed with simulated results. W/C X-ray supermirrors with wider sp ecial band of reflection have been designed using the proposed method for a grea ter grazing incident angle.Keywords：X-ray supermirror;multilayer;simplex optimization- 50
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Published：2020-08-12 -
Design of optical system for space camera with long focal length, wide coverage and high resolution
Abstract：The current requirements for the optical system of a space camera are high resol ution, long focal length, wide field of view small volume and light weight.And all the surfaces in the system designed to satisfy these requirements are of uncoaxis, so that the effect of central obstruction can be avoided, and the syst em has a focal length of 6 m and a field of view of 5白0.2?. The evaluation t est showed that the image quality is near diffraction limit.Keywords：high-resolution;space camera- 53
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Published：2020-08-12 -
Microwave measurement of the conductivity of conducting thin films
Abstract：A new method to measure the conductivity of conducting thin films in a contactle s s fashion was demonstrated. A microwave compact equipment working at 94 GHz was used to measure the amplitude of the reflection coefficient of the microwave sig na l. Indium Tin Oxide films having conductivity of 8.20×104～8.02×105 S/m on the glass substrates were used as the samples. An evaluation equation was bui lt to determine the conductivity from the measured amplitude of the reflection c oefficient. The evaluated conductivity of conducting thin films agrees well with their actual value.Keywords：conductivity;conducting film;microwave;contactless;compact equipment- 66
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Published：2020-08-12 -
Measurement of residual stress in molybdenum/silicon multilayer coat ings
Abstract：The stringent surface figure requirements for the multilayer-c oated elements in an extreme ultraviolet (EUV) projection lithography system mak es it desirable to minimize the deformation resulting from multiplayer film stress es. However, the stress must be reduced or compensated without decreasing EUV refl ectivity because the reflectivity has a strong impact on the throughput of an EUV lithog raphy tool. Several stress reduction and compensation techniques applicable to Mo/Si multilayer coatings, and several stress measurem ent methods are discussed in detail.Keywords：EUVL;multilayer-coatings;residual stress- 65
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Published：2020-08-12 -
Computer simulation of optical pulses propagation in semiconductor optical amplifiers
Abstract：A model has been established with the nonlinear effects of SOA including car rier heating (CH), spectral holeburing (SHB), two-photon absorption (TPA) and no nlinear refraction (NR) in addition to group velocity dispersion and ASE noise o n the amplifier performance taken into consideration to describe the optical pulse pro pagation in a semiconductor optical amplifier(SOA). A SOA simulation software based on the model is used to simulate the i nput-output process of SOA from the complex amplitude of input pulses to the com plex amplitude of output pulses. The software is composed of several function modules reusable in a larger simulation system.Keywords：semiconductor optical amplifiers;Computer simulation;no nlinear effects;ASE noise- 48
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Published：2020-08-12 -
Ultraprecision machining equipment and technology of aspheric optics
Abstract：Nanosys-300 aspheric optical components ultraprecision machining system is one o f the major research achievements in search for ultraprecision machining and m easuring technology for aspheric components during the 9th five-year plan. The m ajor achievements in search for ultraprec ision machining system, machining technology and measuring technology for optica l components, and design and manufacturing of aspheric optical components ultrap recisio n machining system, high speed ultraprecision aerostatic air bearing spindl e system, ultraprecision closed hydrostatic oil bearing slides, high speed ultraprecision aerostatic air bearing electrical grinder spindle system, o pen high performance CNC system integration technology in particular, are revie wed in detail.- 56
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Published：2020-08-12 -
Computer controlled optical finishing for wave front error correction
Abstract：Optics or diffraction is usually used for wave front error correction of high po wer solid laser facility. But there are still some diff iculties in applying these technologies in practice. The use of a small lap top comput er contro lled optical finishing (CCOF) for correcting the wave front error of a large ape rtur e high power solid laser facility provides a new solution to this problem. The experimental result showed that the wave front error decreased from PV 4.59 λ(λ=632.8 nm) RMS 0.938 λ to PV 0.43 λ RMS 0.075 λ and it is passible to use CCOF for wave front error correction.Keywords：CCOF;wave front error;corrector- 48
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Published：2020-08-12 -
Critical technologies and their development for airborne opto-electronic reconnaissance platforms
Abstract：The domestic and international development of airborne opto-electronic reconnaissance platforms and their existing problems are analyzed and studied. Unit optimization and system in tegration involve selection of gimbal number for opto-electronic reconnaissan ce platforms, selection of platform gimbal and material,arrangement an d selection of payload,design of environment adaptation. Improvement of imag e quality deals with inertia stability control technology,pass ive isolation and damping technology,electronic image stabilization. In addition,image track and p rocessing and moving measurement and the deve l opment trend of airborne opto-electronic reconnaissance platforms are discussed.Keywords：opto-electronic reconnaissanle platforms;inretia stability;electronic image stabilization;moving measurement- 49
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Published：2020-08-12 -
Research on flexible hinges
Abstract：Flexible hinge is a new type of hinge widely used in precision machines. The types and the characteristics of flexible hinges wit h different notches are summarised,and sin gle axis-double circular hinges are compared with single axis-single circular no tch hinges. The fabrication and application of flexib le hinges are discussed as well.Keywords：flexible hinges;notch type;tensile strength;bend rigidity- 60
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Published：2020-08-12 -
Two low-speed nonlinear compensations for servo system
Abstract：Two strategies: adaptive low speed jitter compensat ion and PID control with high gain are proposed to compensate the nonlinear factors in a servo system. Experimental results show that the minimum stable speed with adaptive control is 0.002 4°/s, and the tracking error peak-peak value is 0.695″; when the minimum stable speed with PID compensation is 0.029 6°/s, the tracking error peak-peak value is 1.281 5″.Keywords：servo system;low speed;jitter;friction moment;compensation- 57
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Published：2020-08-12 -
Heterodyne testing technique and its applications in micro-machining
Abstract：Two main problems of heterodyne interferometer, lateral resolution of interferometer, and the nonli near errors and its compensation, are discussed by first introducing a new analy tical method to ac hieve positioning accuracy of sub-micron and then establishing a mathematical mo del o f the relationship between the measurement phase and the amplitude distribution of laser beam to explain the gradual change of the measu rement phase around the sharp step. The amplitude distribution of laser beam at the step can be got and the lateral positioning accuracy can be achieved to the magn itude of submicron by using the estimation method used for ordinary laser beam. The results of analysis of the three major nonlinear error sources of the common -path interferom eter show that the error caused by Wollaston prism is mainly second harmonic and the error caused by elliptical polarization of laser is firs t harmo nic. Further analysis indicates that the misorientation of metal mirror can ca use the two r eflecting beams to change from linear polarized beams into elliptical polarized bea ms with nonorthoganal and nonequal eccentricity, which can generate mainly the f i rst harmonic nonlinear error. In additions, error compensation methods are also proposed to improve the accuracy of the interferometer.Keywords：heterodyne interferometer;positioning accuracy;nonlinear error;pol arization mixing- 50
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Published：2020-08-12 -
A new optical encoder
Abstract：Optical encoder is an important sensor used for length and angle measu rement, and two conventional optical encodes, incremental and absolute enco d ers, have outstanding advantages in optical pattern, principle of position code and signal processing circuit. With development of science and technology, a new optical encoder, virtual absolute encoder has inherited the advantages of these two conventional optical encoders. According to the principle of s erial position code, a scheme of 100 positions around a circle has been obtained with CAD. Using this position code a virtual absolute encoder has been designed.Keywords：Optical encoder;incremental encoder;absolute encoder;virtual absolute encoder- 47
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Published：2020-08-12
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