摘要:MEMS(Micro ElectroMechanical System)based on semiconductor microfabrication plays im-portant roles for example in the periphery of IT systems.N EMS(Nano Elect roMechanical Sys-tem)contains nano-scale structures.Sop histicated and high performance systems based on the MEMS and the NEMS have been developed.Packaging and elect rical interconnection play an important role in realizing practically applicable systems.
摘要:Using Micro-Electro-Mechanical System (MEMS)technology,many devices and systems can be miniaturized.M icro pressure sensors and micro accelerometers(air-bag sensor)are examples that are widely commercialized.In the case of optical system,some optical components need to be
combined to implement the function desired f or optical processing.A micro-optical bench based on a Si surface and bulk microm achining has been proposed in order to integrate optical components on a Si substrate.